| 6057182 |
Hydrogenation of polysilicon thin film transistors |
Lawrence A. Goodman, Grzegorz Kaganowicz, Harry Louis Pinch, Ronald K. Smeltzer |
2000-05-02 |
| 5958793 |
Patterning silicon carbide films |
Vipulkumar Patel, Lawrence A. Goodman |
1999-09-28 |
| 5942448 |
Method of making contacts on an integrated circuit |
— |
1999-08-24 |
| 4810617 |
Treatment of planarizing layer in multilayer electron beam resist |
Richard N. Brown |
1989-03-07 |
| 4784936 |
Process of forming a resist structure on substrate having topographical features using positive photoresist layer and poly(vinyl pyrrolidone) overlayer |
Nancy A. Miszkowski |
1988-11-15 |
| 4741926 |
Spin-coating procedure |
Nancy A. Miszkowski |
1988-05-03 |
| 4737033 |
Alignment key and method of making the same |
Anton G. Moldovan, Frank V. L. Shallcross |
1988-04-12 |
| 4702993 |
Treatment of planarizing layer in multilayer electron beam resist |
Richard H. Brown |
1987-10-27 |
| 4618565 |
Absorptive layer for optical lithography |
Nancy A. Miszkowski, Aaron William Levine |
1986-10-21 |
| 4609447 |
Method of detecting alkali metal ions |
Jen-shen Maa |
1986-09-02 |
| 4600597 |
Method and device for determining the contour of spin-coated thin films of material on substrate topography |
Nancy A. Miszkowski |
1986-07-15 |
| 4532002 |
Multilayer planarizing structure for lift-off technique |
— |
1985-07-30 |
| 4498775 |
Method for detecting distance deviations to a photoresist surface in an optical printer |
— |
1985-02-12 |
| 4470871 |
Preparation of organic layers for oxygen etching |
Metodi Popov |
1984-09-11 |
| 4427713 |
Planarization technique |
Metodi Popov |
1984-01-24 |
| 4319954 |
Method of forming polycrystalline silicon lines and vias on a silicon substrate |
Chung P. Wu |
1982-03-16 |
| 4278508 |
Method of detecting a cathodic corrosion site on a metallized substrate |
Robert B. Comizzoli, George L. Schnable |
1981-07-14 |
