Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6057182 | Hydrogenation of polysilicon thin film transistors | Lawrence A. Goodman, Grzegorz Kaganowicz, Harry Louis Pinch, Ronald K. Smeltzer | 2000-05-02 |
| 5958793 | Patterning silicon carbide films | Vipulkumar Patel, Lawrence A. Goodman | 1999-09-28 |
| 5942448 | Method of making contacts on an integrated circuit | — | 1999-08-24 |
| 4810617 | Treatment of planarizing layer in multilayer electron beam resist | Richard N. Brown | 1989-03-07 |
| 4784936 | Process of forming a resist structure on substrate having topographical features using positive photoresist layer and poly(vinyl pyrrolidone) overlayer | Nancy A. Miszkowski | 1988-11-15 |
| 4741926 | Spin-coating procedure | Nancy A. Miszkowski | 1988-05-03 |
| 4737033 | Alignment key and method of making the same | Anton G. Moldovan, Frank V. L. Shallcross | 1988-04-12 |
| 4702993 | Treatment of planarizing layer in multilayer electron beam resist | Richard H. Brown | 1987-10-27 |
| 4618565 | Absorptive layer for optical lithography | Nancy A. Miszkowski, Aaron William Levine | 1986-10-21 |
| 4609447 | Method of detecting alkali metal ions | Jen-shen Maa | 1986-09-02 |
| 4600597 | Method and device for determining the contour of spin-coated thin films of material on substrate topography | Nancy A. Miszkowski | 1986-07-15 |
| 4532002 | Multilayer planarizing structure for lift-off technique | — | 1985-07-30 |
| 4498775 | Method for detecting distance deviations to a photoresist surface in an optical printer | — | 1985-02-12 |
| 4470871 | Preparation of organic layers for oxygen etching | Metodi Popov | 1984-09-11 |
| 4427713 | Planarization technique | Metodi Popov | 1984-01-24 |
| 4319954 | Method of forming polycrystalline silicon lines and vias on a silicon substrate | Chung P. Wu | 1982-03-16 |
| 4278508 | Method of detecting a cathodic corrosion site on a metallized substrate | Robert B. Comizzoli, George L. Schnable | 1981-07-14 |