Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7625015 | Fluid connector | Richard D. Blethen | 2009-12-01 |
| 7618027 | Vaporizer for delivery of low vapor pressure gases | — | 2009-11-17 |
| 7510692 | Hydride gas purification for the semiconductor industry | Daniel Alvarez, Jr., Joshua T. Cook, Tram Nguyen, Daniel Lev, Troy Scoggins | 2009-03-31 |
| 7384149 | Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system | Antonius Johannes Van Der Net, Johannus Josephus Van Bragt | 2008-06-10 |
| 7381243 | Method for purifying carbon dioxide | Daniel Alvarez, Jr., Russell J. Holmes | 2008-06-03 |
| 7377982 | Method for the removal of airborne molecular contaminants using water gas mixtures | Daniel Alvarez, Jr. | 2008-05-27 |
| 7376489 | Method of identifying fluid purification equipment which is optimized for individual fluid purification systems | — | 2008-05-20 |
| 7189291 | Method for the removal of airborne molecular contaminants using oxygen gas mixtures | Daniel Alvarez, Jr., Allan Tram, Russell J. Holmes | 2007-03-13 |
| 7113254 | Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system | Antonius Johannes Van Der Net, Erik Johannus Josephus Van Bragt | 2006-09-26 |
| 7101416 | Method for purification of lens gases used in photolithography and metrology | Daniel Alvarez, Jr. | 2006-09-05 |
| 6913654 | Method for the removal of airborne molecular contaminants using water gas mixtures | Daniel Alvarez, Jr. | 2005-07-05 |
| 6869463 | Method for rapid activation or preconditioning of porous gas purification substrates | Daniel Alvarez, Jr., Joshua T. Cook | 2005-03-22 |
| 6645898 | Method for purification of lens gases used in photolithography | Daniel Alvarez, Jr. | 2003-11-11 |
| 6638341 | Method for rapid activation or preconditioning of porous gas purification substrates | Daniel Alvarez, Jr., Joshua T. Cook | 2003-10-28 |
| 6524544 | Self-regenerative process for contaminant removal from ammonia | Daniel Alvarez, Jr. | 2003-02-25 |
| 6514313 | Gas purification system and method | Russell L. Abber | 2003-02-04 |
| 6471747 | Method and apparatus for delivering and recovering gasses | Arvind K. Venkatesh, Mitchell Albert | 2002-10-29 |
| 6468333 | Gas purifier apparatus | Michael George Rixon | 2002-10-22 |
| 6408849 | Recovery and purification of gases used in medical processes | Daniel Alvarez, Jr., Peter K. Shogren, Joshua T. Cook | 2002-06-25 |
| 6391090 | Method for purification of lens gases used in photolithography | Daniel Alvarez, Jr. | 2002-05-21 |
| 6361696 | Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streams | Daniel Alvarez, Jr., Peter K. Shogren, Joshua T. Cook | 2002-03-26 |
| 6350300 | Gas purification apparatus | Peter K. Shogren | 2002-02-26 |
| D452552 | Offset filter housing | Peter K. Shogren | 2001-12-25 |
| 6089282 | Method for recovery and reuse of gas | Peter K. Shogren | 2000-07-18 |
| 6059859 | Method, composition and apparatus for water removal from non-corrosive gas streams | Daniel Alvarez, Jr. | 2000-05-09 |