Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7403023 | Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered. | Edward Tsidilkovski | 2008-07-22 |
| 7160742 | Methods for integrated implant monitoring | — | 2007-01-09 |
| 7119569 | Real-time in-line testing of semiconductor wafers | — | 2006-10-10 |
| 6911350 | Real-time in-line testing of semiconductor wafers | Edward Tsidilkovski | 2005-06-28 |
| 4394180 | Method of forming high resistivity regions in GaAs by deuteron implantation | Geoffrey Dearnaley, Ian J. Saunders | 1983-07-19 |
| 4290825 | Semiconductor devices containing protons and deuterons implanted regions | Geoffrey Dearnaley, Ian J. Saunders | 1981-09-22 |