| 7910429 |
Method of forming ONO-type sidewall with reduced bird's beak |
Zhong Dong, Ching-Hwa Chen, Chunchieh Huang, Jin Ho Kim, Vei-Han Chan +4 more |
2011-03-22 |
| 7323729 |
Methods for improving quality of high temperature oxide (HTO) formed from halogen-containing precursor and products thereof and apparatus therefor |
Zhong Dong, Chia-Shun Hsiao |
2008-01-29 |
| 7297597 |
Method for simultaneously fabricating ONO-type memory cell, and gate dielectrics for associated high voltage write transistors and gate dielectrics for low voltage logic transistors by using ISSG |
Zhong Dong, Ching-Hwa Chen, Chia-Shun Hsiao |
2007-11-20 |
| 7229880 |
Precision creation of inter-gates insulator |
Zhong Dong, Chunchieh Huang |
2007-06-12 |
| 7122415 |
Atomic layer deposition of interpoly oxides in a non-volatile memory device |
Zhong Dong, Vei-Han Chan, Ching-Hwa Chen |
2006-10-17 |
| 7087998 |
Control of air gap position in a dielectric layer |
Tai-Peng Lee, Ching-Yueh Hu |
2006-08-08 |
| 7071127 |
Methods for improving quality of semiconductor oxide composition formed from halogen-containing precursor |
Zhong Dong, Chia-Shun Hsiao |
2006-07-04 |
| 7026172 |
Reduced thickness variation in a material layer deposited in narrow and wide integrated circuit trenches |
Tai-Peng Lee |
2006-04-11 |
| 7001810 |
Floating gate nitridation |
Zhong Dong, Ching-Hwa Chen |
2006-02-21 |
| 6924542 |
Trench isolation without grooving |
Hua Ji, Dong-Jun KIM, Jin Ho Kim |
2005-08-02 |
| 6893920 |
Method for forming a protective buffer layer for high temperature oxide processing |
Zhong Dong |
2005-05-17 |
| 6881668 |
Control of air gap position in a dielectric layer |
Tai-Peng Lee, Ching-Yueh Hu |
2005-04-19 |
| 6849897 |
Transistor including SiON buffer layer |
Zhong Dong |
2005-02-01 |
| 6787409 |
Method of forming trench isolation without grooving |
Hua Ji, Dong-Jun KIM, Jin Ho Kim |
2004-09-07 |
| 5767004 |
Method for forming a low impurity diffusion polysilicon layer |
Narayanan Balasubramanian, Ching Win Kong |
1998-06-16 |
| 5618756 |
Selective WSix deposition |
Peter Chew |
1997-04-08 |