Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7141095 | Precursor material delivery system for atomic layer deposition | Bradley J. Aitchison, Jarmo Maula, Hannu Leskinen, Teemu Lang, Pekka Kuosmanen +1 more | 2006-11-28 |