Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644746 | Inverse etch model for mask synthesis | Hua Song | 2023-05-09 |
| 8498469 | Full-field mask error enhancement function | Thomas Christopher Cecil, Linyong Pang, Robert E. Gleason, John F. McCarty | 2013-07-30 |
| 7312004 | Embedded attenuated phase shift mask with tunable transmission | — | 2007-12-25 |
| 6472766 | Step mask | — | 2002-10-29 |