Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target profile for a physical vapor deposition chamber target

Target profile for a physical vapor deposition chamber target

US Patent D940765 · Granted Jan 11, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduced substrate process chamber cavity volume2025
Methods and apparatus for wafer detection2025
Systems and methods for increasing blood flow2025
Substrate processing module and method of moving a workpiece2025
Apparatus for controlling lift pin movement2025
Molybdenum monolithic physical vapor deposition target2025
Molybdenum monolithic physical vapor deposition target2025
Washing machine2025
Semiconductor process equipment2025
Apparatus for improved high pressure plasma processing2025
Floating pin for substrate transfer2025
Shutter disk for physical vapor deposition (PVD) chamber2025