Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Focusing ring

Focusing ring

US Patent D709537 · Granted Jul 22, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus2024
Substrate processing apparatus2023
Method for cleaning substrate transfer mechanism and substrate processing system2021
Substrate processing apparatus and method of transferring substrate2020
Method for cleaning substrate transfer mechanism and substrate processing system2020
Plasma processing apparatus having a baffle plate and a rectifying plate2019
Electrode plate for plasma etching and plasma etching apparatus2017
Plasma processing apparatus2016
Electrode plate for plasma etching and plasma etching apparatus2015
Electrode for use in plasma processing apparatus and plasma processing apparatus2014
Focusing ring2014
Focusing ring2014