Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Reaction chamber base plate

Reaction chamber base plate

US Patent D1059311 · Granted Jan 28, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for cleaning a vessel2025
Weighted lift pin2025
Weighted lift pin2025
Substrate susceptor using edge purging2025
Chemical source vessel with dip tube2025
Alignment fixture for a reactor system2025
Detection method for seized traveling lift pins in wafer processing reactor syst2025
Semiconductor processing apparatus and methods for monitoring and controlling a 2025
Channeled lift pin2024
Laser alignment fixture for a reactor system2024
Semiconductor deposition reactor manifolds2023
Chemical source vessel with dip tube2023