Semiconductor deposition reactor manifolds

Assignee

• Asm Ip Holding B.V.

Inventors

• Dinkar Nandwana (5 patents)
• Eric James Shero (129 patents)
• Carl Louis White (65 patents)
• Todd Robert Dunn (32 patents)
• William George Petro (8 patents)
• Jereld Lee Winkler (26 patents)
• Aniket Chitale (1 patents)

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