Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Flexible temperature compensation systems and methods for substrate processing systems

Flexible temperature compensation systems and methods for substrate processing systems

US Patent 9864361 · Granted Jan 9, 2018

Estimated economic value: $33,483,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of etch model calibration using optical scatterometry2023
Pulsed plasma chamber in dual chamber configuration2023
Multi zone gas injection upper electrode system2023
Method and apparatus for determining process rate2021
Systems and methods for calibrating scalar field contribution values for a limit2021
Systems and methods for performing edge ring characterization2021
Method of etch model calibration using optical scatterometry2021
Method of feature exaction from time-series of spectra to control endpoint of pr2020
System and method for determining field non-uniformities of a wafer processing c2020
Multi zone gas injection upper electrode system2020
Photoresist design layout pattern proximity correction through fast edge placeme2020
Method of etch model calibration using optical scatterometry2020