Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chuck, in particular for use in a mask aligner

Chuck, in particular for use in a mask aligner

US Patent 9824909 · Granted Nov 21, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and test system for assessing the quality of a multi-channel micro- and/o2023
Positioning device2021
Wafer support system, wafer support device, system comprising a wafer and a wafe2021
Device for treating a disc-shaped substrate and support adapter2018
Chef knife2018
Pressure sensitive adhesive2018
Method of producing a self-adhesive tape having a layer of photoinitiator-free p2018
Apparatus, method and system for a modular light-emitting diode circuit assembly2017
Thermally crosslinking polyacrylates and process for their preparation2016
Method and device for active wedge error compensation between two objects that c2016
Multi-purpose illumination device2016
Thermally crosslinking polyacrylates and method for producing the same2014