Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heat transfer system for an inductively coupled plasma device

Heat transfer system for an inductively coupled plasma device

US Patent 9820370 · Granted Nov 14, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mask defect repair apparatus and mask defect repair method2024
Focused ion beam processing apparatus2023
ICP emission spectrophotometer2019
Stabilized ICP emission spectrometer and method of using2017
Energy dispersive X-ray analyzer and method for energy dispersive X-ray analysis2016
X-ray fluorescence analyzer and X-ray fluorescence analysis method2013
Composite focused ion beam device, process observation method using the same, an2012
Composite charged particle beam apparatus, method of processing a sample and met2011
Focused ion beam apparatus2010
X-ray tube and X-ray analysis apparatus2009
X-ray tube and X-ray analysis apparatus2009
Method and apparatus for specifying working position on a sample and method of w2009