Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for defect detection using multi-spot scanning

System and method for defect detection using multi-spot scanning

US Patent 9810643 · Granted Nov 7, 2017

Estimated economic value: $31,945,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical phase measurement method and system2025
System and method for digital optical aberration correction and spectral imaging2025
Polarization optical system2025
System and method for optical imaging and measurement of objects2025
Optical inspection using controlled illumination and collection polarization2025
Multi-perspective wafer analysis2023
Optical inspection using controlled illumination and collection polarization2023
System and method for defect detection using multi-spot scanning2022
System and method for defect detection using multi-spot scanning2022
System and method for defect detection using multi-spot scanning2022
Wavefront sensor and method of using it2022
Inspection of a three dimensional structure of a sample using a phase shift mask2022