Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for making suspended elements with different thicknesses for a MEMS and NEMS structure

Method for making suspended elements with different thicknesses for a MEMS and NEMS structure

US Patent 9802817 · Granted Oct 31, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of producing semiconductor devices in a substrate including etching of th2022
Hinged microelectromechanical and/or nanoelectromechanical device with out-of-pl2022
Microdevice comprising at least two movable elements2022
Micro-device having a plurality of mobile elements arranged in a plurality of em2019
Method for making a suspended membrane structure with buried electrode2017
Process for producing at least one silicon-based nanoelement in a silicon oxide 2015
Process for producing vertical interconnections through structured layers2014
Structure with a moving portion and a buried electrode for movement detection in2014
Making of a microelectronic device including a monocrystalline silicon NEMS comp2013