Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element

Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element

US Patent 9758369 · Granted Sep 12, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for closing openings in a flexible diaphragm of a MEMS element2023
MEMS microphone system2021
MEMS transducer system for pressure and acoustic sensing2021
System of non-acoustic sensor combined with MEMS microphone2021
Method for producing thin MEMS wafers2020
MEMS microphone system having an electrode assembly2020
Microphone with encapsulated moving electrode2020
Sensor element for thermal anemometry2019
MEMS microphone system and method2019
MEMS pressure sensor with multiple membrane electrodes2019
Capacitive MEMS-sensor element having bond pads for the electrical contacting of2017
MEMS membrane overtravel stop2016