Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and process for integrated gas blending

Apparatus and process for integrated gas blending

US Patent 9666435 · Granted May 30, 2017

Estimated economic value: $21,738,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and systems useful for producing aluminum ions2025
Method and systems useful for producing aluminum ions2024
Germanium tetraflouride and hydrogen mixtures for an ion implantation system2023
Ion implantation system with mixture of arc chamber materials2023
Fluorine ion implantation system with non-tungsten materials and methods of usin2022
Adsorbent-based, mechanically-regulated gas storage and delivery vessel2022
Germanium tetraflouride and hydrogen mixtures for an ion implantation system2022
Ion implantation system with mixture of arc chamber materials2021
Silicon implantation in substrates and provision of silicon precursor compositio2021
Hydrogenated isotopically enriched boront trifluoride dopant source gas composit2021
Solid precursor-based delivery of fluid utilizing controlled solids morphology2021
Ion implantation processes and apparatus using gallium2021