Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System, method and apparatus for using optical data to monitor RF generator operations

System, method and apparatus for using optical data to monitor RF generator operations

US Patent 9627186 · Granted Apr 18, 2017

Estimated economic value: $24,467,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Water purifier2025
Water purifier2025
Methods and apparatus for controlling plasma in a plasma processing system2025
Large spot spectral sensing to control spatial setpoints2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025
Sensor data compression in a plasma tool2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2024
Methods and apparatus for controlling plasma in a plasma processing system2023
Adjustment of power and frequency based on three or more states2022
Method and apparatus for determining process rate2021
Using modeling for identifying a location of a fault in an RF transmission syste2021
Systems and methods for reducing power reflected towards a higher frequency RF g2021