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Home › Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power

Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power

US Patent 10911081 · Granted Feb 2, 2021

Estimated economic value: $363,946,000 ⓘ

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