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Home › Process for producing a contact on an active zone of an integrated circuit, for example produced on an SOI substrate, in particular an FDSOI substrate, and corresponding integrated circuit

Process for producing a contact on an active zone of an integrated circuit, for example produced on an SOI substrate, in particular an FDSOI substrate, and corresponding integrated circuit

US Patent 9590064 · Granted Mar 7, 2017

Estimated economic value: $14,445,000 ⓘ

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