Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pellicle with aerogel support frame

Pellicle with aerogel support frame

US Patent 9547232 · Granted Jan 17, 2017

Estimated economic value: $11,381,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme ultraviolet (EUV) lithography mask2020
Extreme ultraviolet mirrors and masks with improved reflectivity2019
Assist cuts disposed in dummy lines to improve metal signal cuts in active lines2018
Methods of design rule checking of circuit designs2017
Methods of generating circuit layouts that are to be manufactured using SADP rou2017
Self-aligned double patterning process for metal routing2017
Blazed grating spectral purity filter and methods of making such a filter2016
Method for a low profile etchable EUV absorber layer with embedded particles in 2016
Middle of-line architecture for dense library layout using M0 hand-shake2016
MOL architecture enabling ultra-regular cross couple2016
Mask-aware routing and resulting device2016
Scattering enhanced thin absorber for EUV reticle and a method of making2016