Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lamp for rapid thermal processing chamber

Lamp for rapid thermal processing chamber

US Patent 9536728 · Granted Jan 3, 2017

Estimated economic value: $13,194,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for controlling a flow process material to a deposition cha2025
Pulse train annealing method and apparatus2025
Multi zone spot heating in EPI2024
Annealing apparatus using two wavelengths of radiation2024
System for non radial temperature control for rotating substrates2024
Multi zone spot heating in EPI2023
Method and apparatus for measuring temperature2023
Sol gel coated support ring2023
Light pipe window structure for thermal chamber applications and processes2022
Lamp cross-section for reduced coil heating2022
Apparatus and method for controlling a flow process material to a deposition cha2022
Circular lamp arrays2022