Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing

Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing

US Patent 9509266 · Granted Nov 29, 2016

Estimated economic value: $12,638,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vapor concentration sensors for process chambers2025
Printed microwave resonator for measuring high electron density plasmas2025
Remote control of vehicle features based on tactile gestures on electronic devic2025
Multi-step predictive control system2025
Systems and methods for user negotiation at a multi-vehicle charging station2025
Impedance tuning utility of vector space defined by transmission line quantities2025
Audio system2025
Systems and methods for selecting a charging entity based on occupancy status2025
Plasma resistant arc preventative coatings for manufacturing equipment component2025
High bandwidth architecture for centralized coherent control at the edge of proc2024
Fleetwide impedance tuning performance optimization2024
Control and prediction of multiple plasma coupling surfaces and corresponding po2024