Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Adjustable shunt assembly for a sputtering magnetron and a method for adjusting such a shunt

Adjustable shunt assembly for a sputtering magnetron and a method for adjusting such a shunt

US Patent 9476118 · Granted Oct 25, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrica2017
Magnetron for cylindrical targets2016
Cylindrical magnetron having a shunt2015
Seal and fixation assembly for a rotating cylindrical magnetron electrode2014
Microwave-assisted rotatable PVD2013
Emergency watercraft2010
High target utilization magnet array and associated methods2002
Use of multiple anodes in a magnetron for improving the uniformity of its plasma1997