Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetron for cylindrical targets

Magnetron for cylindrical targets

US Patent 9349576 · Granted May 24, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrica2017
Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrica2017
Adjustable shunt assembly for a sputtering magnetron and a method for adjusting 2016
Cylindrical magnetron having a shunt2015
Cylindrical magnetron having a shunt2015
Seal and fixation assembly for a rotating cylindrical magnetron electrode2014
Cylindrical magnetron2013
High power cathode2013
Microwave-assisted rotatable PVD2013
Emergency watercraft2010
Moving magnetic/cathode arrangement and method2007
High target utilization magnet array and associated methods2002