Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Seal and fixation assembly for a rotating cylindrical magnetron electrode

Seal and fixation assembly for a rotating cylindrical magnetron electrode

US Patent 8845868 · Granted Sep 30, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrica2017
Adjustable shunt assembly for a sputtering magnetron and a method for adjusting 2016
Magnetron for cylindrical targets2016
Cylindrical magnetron having a shunt2015
Microwave-assisted rotatable PVD2013
Emergency watercraft2010
High target utilization magnet array and associated methods2002
Use of multiple anodes in a magnetron for improving the uniformity of its plasma1997