Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hybrid scanning for ion implantation

Hybrid scanning for ion implantation

US Patent 9443698 · Granted Sep 13, 2016

Estimated economic value: $3,990,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scanning magnet design with enhanced efficiency2021
Scan and corrector magnet designs for high throughput scanned beam ion implanter2021
Tetrode extraction apparatus for ion source2020
Scan and corrector magnet designs for high throughput scanned beam ion implanter2020
Beam profiling speed enhancement for scanned beam implanters2019
Ion implantation system having beam angle control in drift and deceleration mode2018
System and method to improve productivity of hybrid scan ion beam implanters2017
Combined electrostatic lens system for ion implantation2017
Integrated extraction electrode manipulator for ion source2016
Beam line design to reduce energy contamination2015
Microwave plasma electron flood2014
System and method for ion implantation with improved productivity and uniformity2014