Charged particle beam apparatus, specimen observation system and operation program

Assignee

• Hitachi High-Technologies

Inventors

• Yayoi Konishi (20 patents)
• Mitsugu Sato (129 patents)
• Masaki Takano (38 patents)
• Shotaro Tamayama (16 patents)
• Masako Nishimura (10 patents)
• Shunya Watanabe (21 patents)
• Mami Konomi (15 patents)

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