Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical system, inspection system and manufacturing method

Optical system, inspection system and manufacturing method

US Patent 9411244 · Granted Aug 9, 2016

Estimated economic value: $5,965,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Headboard2025
Method for region of interest processing for reticle particle detection2025
Contaminant identification metrology system, lithographic apparatus, and methods2025
Invariable magnification multilevel optical device with telecentric converter2024
Invariable magnification multilevel optical device with telecentric converter2024
Lithographic patterning device multichannel position and level gauge2023
Lithographic patterning device multichannel position and level gauge2023
Adjustable scribe and associated use therefore2023
Apparatus for and method cleaning a support inside a lithography apparatus2022
Adjustable scribe and associated use therefore2021
Apparatus including a gas gauge and method of operating the same2019
Compact two-sided reticle inspection system2018