Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for enhancing dynamic range of charge coupled device-based spectrograph

Apparatus and method for enhancing dynamic range of charge coupled device-based spectrograph

US Patent 9386241 · Granted Jul 5, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System, apparatus, and method for improved background correction and calibration2024
System and method for measurement of complex structures2020
System and method for calibration of optical signals in semiconductor process sy2019
Electron beam exciter for use in chemical analysis in processing systems2018
Referenced and stabilized optical measurement system2017
Workpiece characterization system2016
Calibration of a radiometric optical monitoring system used for fault detection 2012
Heterodyne reflectometer for film thickness monitoring and method for implementi2008
System and method for in-situ monitor and control of film thickness and trench d2006
Optical closed-loop control system for a CMP apparatus and method of manufacture2006
Apparatus for characterization of microelectronic feature quality2003
Method for characterization of microelectronic feature quality2002