Electrostatic chuck apparatus

Assignee

• Sumitomo Osaka Cement Co.

Inventors

• Mamoru Kosakai (32 patents)
• Kazunori Ishimura (10 patents)
• Takashi Satou (65 patents)
• Ryuuji Hayahara (7 patents)
• Takeshi Watanabe (507 patents)
• Yoshiaki Moriya (27 patents)
• Kei Furuuchi (4 patents)

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