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Home › Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

US Patent 9325228 · Granted Apr 26, 2016

Estimated economic value: $17,040,000 ⓘ

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