Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Flow balancing in gas distribution networks

Flow balancing in gas distribution networks

US Patent 9268340 · Granted Feb 23, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shower head2025
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Showerhead with air-gapped plenums and overhead isolation gas distributor2020
Temperature controlled showerhead2020
Showerhead with air-gapped plenums and overhead isolation gas distributor2019
High power low pressure UV bulb with plasma resistant coating2019
Lift pin assembly and associated methods2019
Clean resistant windows for ultraviolet thermal processing2019
Temperature controlled showerhead2019
Purging of porogen from UV cure chamber2018
Method for reducing porogen accumulation from a UV-cure chamber2018
Temperature controlled showerhead2016