Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Silicon hardmask layer for directed self-assembly

Silicon hardmask layer for directed self-assembly

US Patent 9249013 · Granted Feb 2, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Adhesion layers for EUV lithography2025
Adhesion layers for EUV lithography2025
Message indication method and apparatus, and device and storage medium2025
Safety production management system for power plant2025
Electrolytic module units and water treatment systems based on boron-doped diamo2025
Information processing method, node, and computer-readable storage medium2024
Adhesion layers for EUV lithography2024
Adhesion layers for EUV lithography2024
Packet tunneling and decapsulation with split-horizon attributes2024
Temperature control method for clothes drying treatment device, and clothes dryi2024
Virtual circuit-based data packet processing method and forwarding table entry c2024
High-silicon-content wet-removable planarizing layer2023