Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Parallel plate reactor for uniform thin film deposition with reduced tool foot-print

Parallel plate reactor for uniform thin film deposition with reduced tool foot-print

US Patent 9224581 · Granted Dec 29, 2015

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Solar cell string for use in a photovoltaic module2024
Photovoltaic device and method for manufacturing the same2023
Actuating drive for adjusting a large rolling bearing2023
Actuating drive for adjusting the pitch angle of a rotor blade of a wind turbine2022
Adjustment unit for adjusting the pitch of a rotor blade, and wind turbine with 2020
Polyvinyl alcohol fibers and films with mineral fillers and small cellulose part2020
Plasma treatment device with two microwave plasma sources coupled to one another2020
Fibers with filler2020
Adjustment unit for adjusting the pitch of a rotor blade, and wind turbine with 2020
Substrate processing device2019
Plasma generation device2018
Fibers with filler2017