Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Parallel batch chemical vapor deposition system

Parallel batch chemical vapor deposition system

US Patent 9169562 · Granted Oct 27, 2015

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for non line-of-sight doping2023
Method and apparatus for non line-of-sight doping2020
Apparatus and techniques to treat substrates using directional plasma and reacti2018
Showerhead apparatus for a linear batch chemical vapor deposition system2018
Showerhead apparatus for a linear batch chemical vapor deposition system2018
Apparatus and techniques to treat substrates using directional plasma and reacti2017
Method and apparatus for surface processing of a substrate using an energetic pa2015
Linear batch chemical vapor deposition system2015
Method and system for inline chemical vapor deposition2014
Cooling apparatus for a web deposition system2012
Cooling apparatus for a web deposition system2012
Apparatus for cathodic vacuum-arc coating deposition2012