Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure device and method for producing structure

Exposure device and method for producing structure

US Patent 9104118 · Granted Aug 11, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Concave diffraction grating and optical device2025
Diffraction grating, method for manufacturing diffraction grating, and photomask2025
Height measuring device and beam irradiation device2024
Manufacturing method of concave diffraction grating, concave diffraction grating2022
Concave diffraction grating, method for producing the same, and optical device2022
Height detection apparatus and charged particle beam apparatus2020
Curved grating, method for manufacturing the same, and optical device2018
Optical microscope device and testing apparatus comprising same2017
Curved face diffraction grating fabrication method, curved face diffraction grat2017
Phase shift mask, method of forming asymmetric pattern, method of manufacturing 2016
Spectrophotometer2006
Atomic absorption spectrophotometer and graphite tube type cuvette used for the 1998