Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wavefront optical measuring apparatus

Wavefront optical measuring apparatus

US Patent 9091614 · Granted Jul 28, 2015

Estimated economic value: $28,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Detection apparatus, lithography apparatus, and article manufacturing method2025
Detector that detects relative positions of marks while blocking non-interferenc2024
Detection device, imprint apparatus, planarization device, detection method, and2020
Optical system for a holographic microscope including a spatial filter2016
Method and device of measuring wavefront aberration, method of manufacturing opt2016
Apparatus and method for estimating wavefront parameters2015
Method and device of measuring wavefront aberration, method of manufacturing opt2015
Hologram with cells to control phase in two polarization directions and exposure2015
Interferometric method and digital holographic microscope2014
Hologram, hologram data generation method, and exposure apparatus2013
Device, method, and system for measuring image profiles produced by an optical l2013
Method and apparatus for measuring surface profile of an object2012