Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device

Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device

US Patent 9030656 · Granted May 12, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Information acquisition system and information acquisition method2025
Substrate processing apparatus and substrate processing method2025
Substrate transfer device and substrate transfer method2025
Substrate processing system and substrate processing method2025
Substrate processing apparatus and substrate processing method2025
Substrate processing apparatus and substrate processing method2025
State determination device, state determination method, and computer-readable re2024
Coating apparatus and coating method2024
Substrate processing apparatus, state determination method and computer-readable2024
Holding pad for carrying substrate2024
Holding pad for carrying substrate2024
Substrate processing apparatus and substrate processing method2024