Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carbon deposition-etch-ash gap fill process

Carbon deposition-etch-ash gap fill process

US Patent 9023731 · Granted May 5, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of tuning film properties of metal nitride using plasma2025
Cathode with layers of anode reductant and solid-electrolyte interphase2025
Robotic strain sensor with higher detection sensitivity2025
Plasma-enhanced deposition of film stacks2025
Systems and methods of detecting Li dendrites2025
Method of reducing titanium nitride etching during tungsten film formation2025
Apparatus and methods for fine planar non-uniformity improvement2025
Sulfurized-carbon cathode with conductive carbon framework2025
MOSFET gate engineerinng with dipole films2025
Enhancing gapfill performance of dram word line2024
Method and system for prostate multi-modal MR image classification based on fove2024
Fluorine-free tungsten ALD for dielectric selectivity improvement2024