Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate transfer method and storage medium

Substrate transfer method and storage medium

US Patent 9002494 · Granted Apr 7, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and method of opening/closing lid of substrate ac2023
Anomaly detection method and semiconductor manufacturing apparatus2019
Plasma processing apparatus, plasma processing method, and storage medium2016
Plasma processing apparatus, plasma processing method, and storage medium2014
Substrate replacing method and substrate processing apparatus2014
Substrate processing apparatus and substrate transfer method adopted in substrat2013
Substrate transfer method, control program, and storage medium storing same2012
Substrate processing apparatus and substrate transfer method adopted in substrat2011
System and method for scheduling the movement of wafers in a wafer-processing to2004
System and method for scheduling the movement of wafers in a wafer-processing to2003
Method for recovering object to be treated after interruption2000