Assignee
Inventors
- Puneet Bajaj (6 patents)
- Tong Liu (135 patents)
- Khalid Mohiuddin Sirajuddin (5 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Methods for etching through-silicon vias with tunable profile angles", "item": "https://www.patentleaderboard.com/patent/8987140"}]}
Skip to contentUS Patent 8987140 · Granted Mar 24, 2015