Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Imprint method, imprinting equipment, and method for manufacturing semiconductor device

Imprint method, imprinting equipment, and method for manufacturing semiconductor device

US Patent 8906281 · Granted Dec 9, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Template, manufacturing method of template, and manufacturing method of semicond2025
Center shift amount estimating apparatus, method, and program2024
Imprint method, method of manufacturing semiconductor device, and imprint device2024
Imprint apparatus, imprint method, and manufacturing method of semiconductor dev2024
Tolerance error estimating apparatus, method, program, reconstruction apparatus 2024
Imprint apparatus, imprint method, and method of manufacturing semiconductor dev2023
Imprint apparatus, imprint method, and article manufacturing method2022
Imprint apparatus, imprint method, and method of manufacturing semiconductor dev2021
Imprint template manufacturing apparatus and imprint template manufacturing meth2020
Imprint template treatment apparatus2020
Imprint apparatus, imprint method, and article manufacturing method2019
Template and pattern formation method2018