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Home › Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method

Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method

US Patent 8898930 · Granted Dec 2, 2014

Estimated economic value: $2,024,000 ⓘ

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