Co-implant for backside illumination sensor

Assignee

• TSMC

Inventors

• Cheng-Tsung Chen (5 patents)
• Hsun-Ying Huang (79 patents)
• Yung-Cheng Chang (38 patents)
• Yung-Fu Yeh (3 patents)
• Yu-Ping Chen (17 patents)
• Chi-Yuan Liang (2 patents)
• Shou-Shu Lu (7 patents)
• Juan Chen (11 patents)
• Jia-Ren Chen (10 patents)
• Horng-Daw Shen (2 patents)
• Chi-Hsun Hsieh (10 patents)

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