Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam apparatus and film thickness measurement method

Charged particle beam apparatus and film thickness measurement method

US Patent 8680465 · Granted Mar 25, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electron gun and electron beam application device2025
Electron gun and electron microscope2025
Electron gun and electron beam application apparatus2024
Electron beam apparatus2023
Charged particle beam device2023
Electron beam device2022
Electron microscope2022
Scanning electron microscope2021
Charged particle beam apparatus and sample observation method using the same2021
Spin polarimeter2021
Charged particle beam device2021
Method of preparing thin film sample piece and charged particle beam apparatus2021