Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Out-of-plane resonator

Out-of-plane resonator

US Patent 8674775 · Granted Mar 18, 2014

Estimated economic value: $13,447,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

All-electronic high-throughput analyte detection system2024
All-electronic high-throughput analyte detection system2021
Differential z-axis resonant accelerometry2021
Multiple-axis resonant accelerometers2020
Method and apparatus for driving a multi-oscillator system2019
Methods and structures for thin-film encapsulation and co-integration of same wi2019
Methods and structures for thin-film encapsulation and co-integration of same wi2019
Method and apparatus for driving a multi-oscillator system2019
Membrane transducer structures and methods of manufacturing same using thin-film2018
Trapped sacrificial structures and methods of manufacturing same using thin-film2018
Membrane transducer structures and methods of manufacturing same using thin-film2017
Temperature compensation for MEMS devices2017