Side gas injector for plasma reaction chamber

Assignee

• Dms Co.

Inventors

• Minshik Kim (3 patents)
• Sungyong Ko (4 patents)
• Hwankook CHAE (4 patents)
• Kunjoo Park (4 patents)
• Keehyun KIM (4 patents)
• Weonmook LEE (4 patents)

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