Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8652296 | Side gas injector for plasma reaction chamber | Sungyong Ko, Hwankook CHAE, Kunjoo Park, Keehyun KIM, Weonmook LEE | 2014-02-18 |
| 8398783 | Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same | Byoungil Lee, Hyeokjin Jang, Sungyong Ko | 2013-03-19 |
| 8323522 | Plasma reactor and etching method using the same | Hyeokjin Jang, Kwangmin Lee, Sungyong Ko, Hwankook CHAE, Kunjoo Park +2 more | 2012-12-04 |