Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398783 | Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same | Byoungil Lee, Sungyong Ko, Minshik Kim | 2013-03-19 |
| 8323522 | Plasma reactor and etching method using the same | Minshik Kim, Kwangmin Lee, Sungyong Ko, Hwankook CHAE, Kunjoo Park +2 more | 2012-12-04 |